| AMAT |
Uvision 3 |
- System is currently running in the Fab. Under OEM Service Contract
- Loading Configuration - FOUP, 2 Positions Loadport - ASYST Isoport Carrier Reader ID OHT
- Operating Software - Windows XP
- SW_Version - 7.5_I Operation Console
- Yaskawa Teach Pendent
- TKM PDC Deep UV
|
1 |
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