| Nanometrics |
Nanospec 9300 |
- 200 or 300mm wafer
- Open cassette or 300mm FOUP
- DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
- Spectroscopic Ellipsometry (SE) from 245 to 1000 nm
- T, n and k measurement on single and multi-layer film stacks
- Windows NT OS for real-time, multi-tasking operations
- N2000 user interface compliant to SEMI standard
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