EQUIPMENTS

Atlas II+

Brand Model Configuration Quantity Picture
Nanometrics Atlas II+
  • ATLAS II PLATFORM--Atlas II+ metrology system
  • Atlas II+ Metrology Components including:
  • 300 mm precision XY Theta stage
  • 210-1700nm spectroscopic ellipsometer,
  • 210-1000nm direct Xenon reflectometer
  • N2000 operation software
  • Matrox Pattern Recognition USB Dongle
  • 10X Lens: T2X Compatible
  • Atlas II SECS License
  • Inspection Window
  • Interface Kit for Atlas/LYNX 2W
  • 2*E4A Loadports
  • LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
  • LYNX Light Tower RGBY
  • Atlas II Light Tower RGBY
  • LYNX HOST SECS Communications
1
Nanometrics Atlas II+
  • ATLAS II PLATFORM--Atlas II+ metrology system
  • Atlas II+ Metrology Components including:
  • 300 mm precision XY Theta stage
  • 210-1700nm spectroscopic ellipsometer,
  • 210-1000nm direct Xenon reflectometer
  • N2000 operation software
  • Matrox Pattern Recognition USB Dongle
  • 10X Lens: T2X Compatible
  • Atlas II SECS License
  • Inspection Window
  • Interface Kit for Atlas/LYNX 2W
  • 2*E4A Loadports
  • LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
  • LYNX Light Tower RGBY
  • Atlas II Light Tower RGBY
  • LYNX HOST SECS Communications
1