EQUIPMENTS

Equipments

Brand Model Configuration Quantity Picture
Nanometrics Atlas II+
  • ATLAS II PLATFORM--Atlas II+ metrology system
  • Atlas II+ Metrology Components including:
  • 300 mm precision XY Theta stage
  • 210-1700nm spectroscopic ellipsometer,
  • 210-1000nm direct Xenon reflectometer
  • N2000 operation software
  • Matrox Pattern Recognition USB Dongle
  • 10X Lens: T2X Compatible
  • Atlas II SECS License
  • Inspection Window
  • Interface Kit for Atlas/LYNX 2W
  • 2*E4A Loadports
  • LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
  • LYNX Light Tower RGBY
  • Atlas II Light Tower RGBY
  • LYNX HOST SECS Communications
1
Nanometrics Atlas II+
  • ATLAS II PLATFORM--Atlas II+ metrology system
  • Atlas II+ Metrology Components including:
  • 300 mm precision XY Theta stage
  • 210-1700nm spectroscopic ellipsometer,
  • 210-1000nm direct Xenon reflectometer
  • N2000 operation software
  • Matrox Pattern Recognition USB Dongle
  • 10X Lens: T2X Compatible
  • Atlas II SECS License
  • Inspection Window
  • Interface Kit for Atlas/LYNX 2W
  • 2*E4A Loadports
  • LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
  • LYNX Light Tower RGBY
  • Atlas II Light Tower RGBY
  • LYNX HOST SECS Communications
1
Nanometrics Nanospec 9300
  • 200 or 300mm wafer
  • Open cassette or 300mm FOUP
  • DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
  • Spectroscopic Ellipsometry (SE) from 245 to 1000 nm
  • T, n and k measurement on single and multi-layer film stacks
  • Windows NT OS for real-time, multi-tasking operations
  • N2000 user interface compliant to SEMI standard
1
Nanometrics Nanospec 8000XSE
  • 100/150/200mm wafer
  • Open cassette
  • DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
  • T, n and k measurement on single and multi-layer film stacks
  • OS2 OperationsSystem
  • AFTuser interface
1
Nanometrics Nanospec 9000i
  • 150/200mm wafer
  • Manual loading
  • Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
  • T, n and k measurement on single and multi-layer film stacks
  • Windows NT OS for real-time, multi-tasking operations
  • N2000 user interface compliant to SEMI standard
1
AMAT Uvision 3
  • System is currently running in the Fab. Under OEM Service Contract
  • Loading Configuration - FOUP, 2 Positions Loadport - ASYST Isoport Carrier Reader ID OHT
  • Operating Software - Windows XP
  • SW_Version - 7.5_I Operation Console
  • Yaskawa Teach Pendent
  • TKM PDC Deep UV
1