EQUIPMENTS

Nanospec 8000XSE

Brand Model Configuration Quantity Picture
Nanometrics Nanospec 8000XSE
  • 100/150/200mm wafer
  • Open cassette
  • DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
  • T, n and k measurement on single and multi-layer film stacks
  • OS2 OperationsSystem
  • AFTuser interface
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