| Nanometrics |
Atlas II+ |
- ATLAS II PLATFORM--Atlas II+ metrology system
- Atlas II+ Metrology Components including:
- 300 mm precision XY Theta stage
- 210-1700nm spectroscopic ellipsometer,
- 210-1000nm direct Xenon reflectometer
- N2000 operation software
- Matrox Pattern Recognition USB Dongle
- 10X Lens: T2X Compatible
- Atlas II SECS License
- Inspection Window
- Interface Kit for Atlas/LYNX 2W
- 2*E4A Loadports
- LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
- LYNX Light Tower RGBY
- Atlas II Light Tower RGBY
- LYNX HOST SECS Communications
|
1 |
 |
| Nanometrics |
Atlas II+ |
- ATLAS II PLATFORM--Atlas II+ metrology system
- Atlas II+ Metrology Components including:
- 300 mm precision XY Theta stage
- 210-1700nm spectroscopic ellipsometer,
- 210-1000nm direct Xenon reflectometer
- N2000 operation software
- Matrox Pattern Recognition USB Dongle
- 10X Lens: T2X Compatible
- Atlas II SECS License
- Inspection Window
- Interface Kit for Atlas/LYNX 2W
- 2*E4A Loadports
- LYNX 2W w/ Dual Paddle Edge Grip Robot (300mm)
- LYNX Light Tower RGBY
- Atlas II Light Tower RGBY
- LYNX HOST SECS Communications
|
1 |
 |
| Nanometrics |
Nanospec 9300 |
- 200 or 300mm wafer
- Open cassette or 300mm FOUP
- DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
- Spectroscopic Ellipsometry (SE) from 245 to 1000 nm
- T, n and k measurement on single and multi-layer film stacks
- Windows NT OS for real-time, multi-tasking operations
- N2000 user interface compliant to SEMI standard
|
1 |
 |
| Nanometrics |
Nanospec 8000XSE |
- 100/150/200mm wafer
- Open cassette
- DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
- T, n and k measurement on single and multi-layer film stacks
- OS2 OperationsSystem
- AFTuser interface
|
1 |
 |
| Nanometrics |
Nanospec 9000i |
- 150/200mm wafer
- Manual loading
- Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
- T, n and k measurement on single and multi-layer film stacks
- Windows NT OS for real-time, multi-tasking operations
- N2000 user interface compliant to SEMI standard
|
1 |
 |
| AMAT |
Uvision 3 |
- System is currently running in the Fab. Under OEM Service Contract
- Loading Configuration - FOUP, 2 Positions Loadport - ASYST Isoport Carrier Reader ID OHT
- Operating Software - Windows XP
- SW_Version - 7.5_I Operation Console
- Yaskawa Teach Pendent
- TKM PDC Deep UV
|
1 |
 |
