| Nanometrics |
Nanospec 9000i |
- 150/200mm wafer
- Manual loading
- Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
- T, n and k measurement on single and multi-layer film stacks
- Windows NT OS for real-time, multi-tasking operations
- N2000 user interface compliant to SEMI standard
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