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AMAT Uvision 3
  • System is currently running in the Fab. Under OEM Service Contract
  • Loading Configuration - FOUP, 2 Positions Loadport - ASYST Isoport Carrier Reader ID OHT
  • Operating Software - Windows XP
  • SW_Version - 7.5_I Operation Console
  • Yaskawa Teach Pendent
  • TKM PDC Deep UV
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