EQUIPMENTS

Nanospec 9300

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Nanometrics Nanospec 9300
  • 200 or 300mm wafer
  • Open cassette or 300mm FOUP
  • DUV-Visible Spectroscopic Reflectometry(SR) from 190 to 780 nm
  • Spectroscopic Ellipsometry (SE) from 245 to 1000 nm
  • T, n and k measurement on single and multi-layer film stacks
  • Windows NT OS for real-time, multi-tasking operations
  • N2000 user interface compliant to SEMI standard
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